MRL

Materials Research Laboratory

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CMM- Secondary Ion Mass Spectrometry (SIMS)

Instrumentation for Secondardy Ion Mass Spectrometry:

Surface Analysis


Staff Contact:

Tim Spila
(217) 244-0298
tspila@illinois.edu

Physical Electronics PHI Trift III

Location
B04 Materials Research Laboratory

General
The PHI TRIFT III is a Time of Flight SIMS which uses a gold liquid metal ion source as the analysis ion beam. The gold source can be run with Au+, Au2+, and Au3+ ions. The TRIFT III normally operates in static mode which allows for the analysis of both elemental and molecular species at the sample surface. The mass range can be set to 10,000 amu or more for large organic molecules. A dual ion source (Cs and O) is also available for elemental depth profiling work.