CMM- X-ray Photoelectron Spectroscopy (XPS)
Instrumentation for X-ray Photoelectron Spectroscopy:
XPS Instruments
Staff Contact:
Rick Haasch
(217) 244-2974
r-haasch@illinois.edu
Kratos Axis ULTRA
General
The Axis ULTRA is a is a high performance X-ray photoelectron spectrometer for
photoelectron spectroscopy (XPS) and parallel imaging (imaging XPS). The system has a differentially
pumped argon ion gun for sputter cleaning and depth profiling. A key feature of this system is its
applicability to a wide range of sample types and automation.
Location
B81 Materials Research Laboratory
| Features | |
| Excitation Sources | |
| Dual Anode X-ray Source: | Mg, Al |
| Monochromatic Xray Source: | Al |
| Detection System | |
| Small Area Extraction Optics: | |
| Spherical Capacitor Electron Energy Analyzer | |
| Spherical Capacitor Electron Energy Analyzer | |
| Sputtering System | |
| Differentially Pumped 1-5 KeV Ion Gun |