MRL

Materials Research Laboratory

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CMM- Atomic Force Microscopy (AFM)

Staff Contact:

Scott MacLaren
(217) 244-2469 (office)
maclaren@illinois.edu

Training Material and Supplemental Documentation
AFM tip distributors

Digital Instruments Dimension 3100 AFM

The Digital Instruments / Veeco Dimension 3100 AFM allows large samples (up to a six inch wafer) and large scan size (up to 100 microns), and also phase imaging. This instruments has sub-angstrom vertical resolution (lateral resolution is generally limited by the tip geometry, not the instrument).