Materials Research Laboratory

Cameca ims 5f

Location
B01 Materials Research Laboratory

General

The Cameca ims 5f is a dynamic SIMS which uses either cesium or oxygen for the incident primary ion beam, which maximizes sensitivity for both electronegative and electropositive elements. This allows for sensitivity in parts per billion for many elements and can perform depth profiles with 3-15 nm depth resolution. A normal incidence electron gun gives charge neutralization to facilitate the analysis of insulators. Mass resolution up to 20,000 is attainable. The mass range normally is 1-280 amu with extension to 1-500 amu under some conditions. Quantitation of dopant levels is possible with standards.