Materials Research Laboratory

FEI/Philips CM12 TEM

General:
The CM12 is a conventional analytic TEM. It is optimized for BF/DF imaging, diffraction and high sample tilts. It operates at 120kV. The CM12 is equipped with both a video rate camera for real time imaging and a slow scan CCD camera for final images. A double tilt holder is available with +/-60 degrees of tilt. Double tilt heating and liquid N2 stages are available. In STEM mode, the system is fitted with digital scan control and light element EDS. The probe size in STEM mode, however, is very limited (>10nm) due to the thermionic emitter. EDS mapping and line scanning is available.

Location
B60 Materials Research Laboratory

Specifications:

• Energy 120kV
• Tilt 60 degrees on two axes
• Point resolution = 0.34nm
• Information Limit > 0.22nm
• Lens Type-Side entry Twin (condenser objective)

Attachments:

• Digital Imaging - Gatan 794 1kx1k Slow Scan CCD
• Video Imaging - Gatan Video
• EDS - EDAX Dx4 30mm ATW detector
• Digital Scan - EDAX Dx4
• Computer Control - Either Digital Micrograph or FEI
• 1000ºC double tilt holder
• Liquid N₂ double tilt holder

Links

• CM12 - FAQ
• CMM-Library (UIUC only)
• TEM Instructions
• JEOL Web Site